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Item Statistics

Electron-beam-induced freezing of a positive tone EUV resist for use in directed self-assembly applications

RepositoryUniversity of Queensland [UQ eSpace]
URLhttps://espace.library.uq.edu.au/view/UQ:240593
Author(s)Cheng, Han-Hao; Keen, Imelda; Yu, Anguang; Chuang, Ya-Mi; Blakey, Idriss; Jack, Kevin S.; Leeson, Michael J.; Younkin, Todd R.; Whittaker, Andrew K.
Item typeConference Papers/Posters
DOIhttps://doi.org/10.1117/12.881491

Usage Date Range

Note: Daily statistics are only available for the last six weeks.

     

Country Reporting Period Total 2021-12-22 2021-12-23 2021-12-24 2021-12-25 2021-12-26 2021-12-27 2021-12-28
Overall totals 2 1 0 0 0 0 0 1
United States 2 1 0 0 0 0 0 1
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